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Journal Articles

Development of a plasma generator for 12$$times$$90 ion beam

Horiike, Hiroshi; *; Inoue, Takashi; Mizuhashi, Kiyoshi; Ohara, Yoshihiro; Okumura, Yoshikazu; Tanaka, Shigeru; Watanabe, Kazuhiro

Proc. 11th Symp. on Ion Sources and Ion Assisted Technology, p.109 - 112, 1987/00

no abstracts in English

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